Silicon Carbide (SSiC/SiSiC)

Silicon Carbide (SSiC/SiSiC)

Silicon Carbide is an extremely hard material close to that of diamond. It’s high thermal conductivity, high-temperature strength, low thermal expansion, resistance to chemical reaction, and the fact that it is toxicologically safe make it excellent ceramic material for a wide range of applications.

Micro Ceramics provides parts made of silicon carbide for:

  • Semiconductors – Electrostatic chucks, vacuum chucks, ceramic blades, dry and wet components
  • Optoelectronic – Lightweight optical mirrors, semiconductor wafer handling, reflective imaging systems
  • Other – Seals, bearings, pipes, 

Key silicon carbide properties:

  • Low density (3.1–3.2 g/cm3)
  • High flexural strength (450-540 MPa)
  • High hardness (22.0-25.0 GPa)
  • Low thermal expansion (3.7-4.2 ×10-6/℃)
  • High elastic modulus (430 GPa)
  • Excellent thermal shock resistance (400 ℃)
  • Superior chemical inertness

See properties table for more information.