Semiconductor Applications

Micro-Ceramics provides solutions and products for the semiconductor manufacturing industry by supplying the chamber-critical components used in sophisticated chip-processing equipment.

These critical components are produced from a very wide range of high-purity technical ceramics and are based on engineering knowledge and experience. In most cases, the product is an extremely intricate component produced using:

  • Ultra-flat capabilities
  • Mirror polish
  • Exceptionally lightweight
  • High stiffness
  • Low thermal expansion
  • Large size capability – 750mm and beyond
  • Extreme wear resistance


  •  Vacuum chuck
  •  Electrostatic chuck 
  •  Ceramic blades
  •  Stage mirrors made of alumina, including a coating with R > 94% @ 633nm 
  •  Dry and wet etch components
  •  Feeds-through insulators

As a qualified supplier to the semiconductor sector, Micro Ceramics has extensive experience in processing parts fabricated from alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, sapphire, quartz, Macor, and more.
The Micro Ceramics team is constantly staying up to date with new industry advances, and supplies state of the art ceramic parts for the new 450mm silicon wafer machines.