Micro Ceramics provides parts made of silicon carbide for:
- Semiconductors – Electrostatic chucks, vacuum chucks, ceramic blades, dry and wet components
- Optoelectronic – Lightweight optical mirrors, semiconductor wafer handling, reflective imaging systems
- Other – Seals, bearings, pipes,
Key silicon carbide properties:
- Low density (3.1–3.2 g/cm3)
- High flexural strength (450-540 MPa)
- High hardness (22.0-25.0 GPa)
- Low thermal expansion (3.7-4.2 ×10-6/℃)
- High elastic modulus (430 GPa)
- Excellent thermal shock resistance (400 ℃)
- Superior chemical inertness
See properties table for more information.